PRIMARY POLISHING PAD – Unfilled
The M-25 is an unfilled, small pore size polyurethane pad. (Modified version of LP-57)
It is designed for reduced defects during silicon wafer primary polishing.
BENEFITS
High stock removal rate
Low pad wear
Low defect level
TYPICAL APPLICATIONS
Sapphire, Silicon
M-25 PAD PROPERTIES (Average)
|
FILLER |
DENSITY |
HARDNESS |
COMPRESSIBILITY |
ELASTIC REBOUND |
|
None |
0.42 (26.0) |
89 |
7.5 |
90 |
Values are subject to change without notification.